Characteristics of capacitively coupled helium plasma driven by various frequencies under constant power conditions

Faculty Science Year: 2013
Type of Publication: ZU Hosted Pages: 5
Authors:
Essam Mohamed AbdelFattah Ibrahim
Journal: Vacuum Elsevier Volume: Vacuum 97 (2013) 65e70
Keywords : Characteristics , capacitively coupled helium plasma driven    
Abstract:
The influence of excitation frequency (13.56e96 MHz) on the characteristics of capacitively coupled helium plasma is investigated by means of Langumir probe and CCD camera. Measurements are performed in helium pressure of 10.66 and 33.3 P
    
     
 
       

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