Combined effects of gas pressure and exciting frequency on electron energy distribution functions in hydrogen capacitively coupled plasmas.

Faculty Science Year: 2013
Type of Publication: ZU Hosted Pages: 9
Authors:
Journal: PHYSICS OF PLASMAS American Institute of Physics Volume: 023501
Keywords : Combined effects , , pressure , exciting frequency , electron    
Abstract:
The combined effects of the variation of hydrogen pressure (40–400 mTorr) and exciting frequency (13.56–50MHz) on the electron energy probability function (EEPF) and other plasma parameters in capacitively coupled hydrogen H2 discharge at
   
     
 
       

Author Related Publications

  • Essam Mohamed AbdelFattah Ibrahim, "Investigation of capacitively coupled argon plasma driven at various frequencies and validation of surface waves excitation", Elsevier, 2013 More
  • Essam Mohamed AbdelFattah Ibrahim, "Characteristics of capacitively coupled helium plasma driven by various frequencies under constant power conditions", Elsevier, 2013 More
  • Essam Mohamed AbdelFattah Ibrahim, "Alpha to gamma mode transition in hydrogen capacitive radio-frequency discharge", NRC Recearch Press, 2013 More
  • Essam Mohamed AbdelFattah Ibrahim, "Positive direct current corona discharges in single wire-duct electrostatic precipitators", AIP Publishing, 2016 More
  • Essam Mohamed AbdelFattah Ibrahim, "Temperature measurements in microwave argon plasma source by using overlapped molecular emission spectra", American institute of Physics, 2015 More

Department Related Publications

  • Abdullah Fathi Aly Saad, "Ageing effects on polymeric track detectors: studies of etched tracks at nanosize scale using atomic force microscope", RADIATION PHYSICS, 2012 More
  • Ahmed Elfalaky Elsaid Abdelrehim, "Electrical and Dielectric Properties of Charge Transfer Complexes: Interactions between Norfloxacin and Ciprofloxacin with Picric Acid and 3,5-Dinitrobenzoic Acid1", Russa, 2013 More
  • Ahmed Elfalaky Elsaid Abdelrehim, "Spectroscopic and physical measurements on charge-transfer complexes: Interactions between norfloxacin and ciprofloxacin drugs with picric acid and 3,5-dinitrobenzoic acid acceptors", Englabd, 2011 More
  • Ahmed Elfalaky Elsaid Abdelrehim, "Bone-like Material, Synthesis, Optimization and Characterization", America, 2014 More
  • Ahmed Elfalaky Elsaid Abdelrehim, "Structural and electrical properties of HgTe thin films", england, 2000 More
Tweet