Combined effects of gas pressure and exciting frequency on electron energy distribution functions in hydrogen capacitively coupled plasmas.

Faculty Science Year: 2013
Type of Publication: ZU Hosted Pages: 9
Authors:
Journal: PHYSICS OF PLASMAS American Institute of Physics Volume: 023501
Keywords : Combined effects , , pressure , exciting frequency , electron    
Abstract:
باستخدام مجس لانجميور(متوافق مع ال RF) تم دراسة تأثير كلا من ضغط الهيدروجين و تردد جهد التفريغ (13.56 الي 50 ميجاهيرتز) علي عدد من معاملات البلازما و دالة توزيع طاقة الإلكترون (function EEDF Electron energy distribution ) في بلازما غاز جز
   
     
 
       

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