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Investigation of capacitively coupled argon plasma driven at various frequencies and validation of surface waves excitation
Faculty
Science
Year:
2013
Type of Publication:
ZU Hosted
Pages:
6
Authors:
Essam Mohamed AbdelFattah Ibrahim
Staff Zu Site
Abstract In Staff Site
Journal:
Physics Letters A Elsevier
Volume:
Volume 377
Keywords :
Investigation , capacitively coupled argon plasma driven
Abstract:
The influence of excitation frequency (13.56–96 MHz) on the characteristics of capacitively coupled argon plasma is investigated by means of Langmuir probe and a high-voltage probe. Measurements are performed in argon pressure of 40 and 6
Author Related Publications
Essam Mohamed AbdelFattah Ibrahim, "Combined effects of gas pressure and exciting frequency on electron energy distribution functions in hydrogen capacitively coupled plasmas.", American Institute of Physics, 2013
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Essam Mohamed AbdelFattah Ibrahim, "Characteristics of capacitively coupled helium plasma driven by various frequencies under constant power conditions", Elsevier, 2013
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Essam Mohamed AbdelFattah Ibrahim, "Alpha to gamma mode transition in hydrogen capacitive radio-frequency discharge", NRC Recearch Press, 2013
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Essam Mohamed AbdelFattah Ibrahim, "Temperature measurements in microwave argon plasma source by using overlapped molecular emission spectra", American institute of Physics, 2015
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