Investigation of capacitively coupled argon plasma driven at various frequencies and validation of surface waves excitation

Faculty Science Year: 2013
Type of Publication: ZU Hosted Pages: 6
Authors:
Essam Mohamed AbdelFattah Ibrahim
Journal: Physics Letters A Elsevier Volume: Volume 377
Keywords : Investigation , capacitively coupled argon plasma driven    
Abstract:
The influence of excitation frequency (13.56–96 MHz) on the characteristics of capacitively coupled argon plasma is investigated by means of Langmuir probe and a high-voltage probe. Measurements are performed in argon pressure of 40 and 6
    
     
 
       

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