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Combined effects of gas pressure and exciting frequency on electron energy distribution functions in hydrogen capacitively coupled plasmas.
Faculty
Science
Year:
2013
Type of Publication:
ZU Hosted
Pages:
9
Authors:
Essam Mohamed AbdelFattah Ibrahim
Staff Zu Site
Abstract In Staff Site
Journal:
PHYSICS OF PLASMAS American Institute of Physics
Volume:
023501
Keywords :
Combined effects , , pressure , exciting frequency , electron
Abstract:
The combined effects of the variation of hydrogen pressure (40–400 mTorr) and exciting frequency (13.56–50MHz) on the electron energy probability function (EEPF) and other plasma parameters in capacitively coupled hydrogen H2 discharge at
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