Combined effects of gas pressure and exciting frequency on electron energy distribution functions in hydrogen capacitively coupled plasmas.

Faculty Science Year: 2013
Type of Publication: ZU Hosted Pages: 9
Authors:
Essam Mohamed AbdelFattah Ibrahim
Journal: PHYSICS OF PLASMAS American Institute of Physics Volume: 023501
Keywords : Combined effects , , pressure , exciting frequency , electron    
Abstract:
The combined effects of the variation of hydrogen pressure (40–400 mTorr) and exciting frequency (13.56–50MHz) on the electron energy probability function (EEPF) and other plasma parameters in capacitively coupled hydrogen H2 discharge at
    
     
 
       

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