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Investigation of capacitively coupled argon plasma driven at various frequencies and validation of surface waves excitation
Faculty
Science
Year:
2013
Type of Publication:
Article
Pages:
297-302
Authors:
Abdel-Fattah, E
DOI:
10.1016/j.physleta.2012.11.014
Journal:
PHYSICS LETTERS A ELSEVIER SCIENCE BV
Volume:
377
Research Area:
Physics
ISSN
ISI:000314015100026
Keywords :
Capacitively coupled plasma, Electron energy distribution function, Very high frequency, Surface wave plasma
Abstract:
The influence of excitation frequency (13.56-96 MHz) on the characteristics of capacitively coupled argon plasma is investigated by means of Langmuir probe and a high-voltage probe. Measurements are performed in argon pressure of 40 and 60 mTorr at a fixed discharge voltage V-pp = 200 V. The measured electron energy distribution function EEPFs are a bi-Maxwellian type irrespective of the driving frequency and gas pressure. The electron density and temperatures show peak over frequency range of 54-72 MHz, beyond which it decreases. The non-monotonic dependences of plasma parameters with driving frequency were interpreted in terms of excited surface wave excited at the powered electrode. (C) 2012 Elsevier B.V. All rights reserved.
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