Alpha to gamma mode transition in hydrogen capacitive radio-frequency discharge

Faculty Science Year: 2013
Type of Publication: ZU Hosted Pages:
Authors:
Journal: Can. J. Phys. NRC research press Volume:
Keywords : Alpha , gamma mode transition , hydrogen capacitive    
Abstract:
Electron energy distribution functions (EEDFs) were measured with increasing discharge voltages in hydrogen capacitively coupled plasmas by means of radio-frequency compensated Langmuir probe. The results are compared with EEDF in argon pla
   
     
 
       

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