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Alpha to gamma mode transition in hydrogen capacitive radio-frequency discharge
Faculty
Science
Year:
2013
Type of Publication:
ZU Hosted
Pages:
Authors:
Omar Farag Mahmoud Farag
Staff Zu Site
Abstract In Staff Site
Journal:
Can. J. Phys. NRC research press
Volume:
Keywords :
Alpha , gamma mode transition , hydrogen capacitive
Abstract:
Electron energy distribution functions (EEDFs) were measured with increasing discharge voltages in hydrogen capacitively coupled plasmas by means of radio-frequency compensated Langmuir probe. The results are compared with EEDF in argon pla
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