NUMERICAL STUDY OF PARTICLES GENERATION AND FLOW IN SiH4/H2 DISCHARGE

Faculty Engineering Year: 2013
Type of Publication: ZU Hosted Pages:
Authors:
Fatma Mohamed Altokhy Mahmoud Eltokhy
Journal: The Egyptian International Journal od Engineering Science and Technology جامعة الزقازيق Volume:
Keywords : NUMERICAL STUDY , PARTICLES GENERATION , FLOW , SiH4/H2    
Abstract:
This paper contains a self consistent numerical study of a fluid model in one dimension for the SiH4/H2 plasma discharge. Fluid model equations are solved for all species and particles specified in the model. Energy equation is solved only
   
     
 
       

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