Plasma discharge for antireflection coating of PV cells

Faculty Engineering Year: 2014
Type of Publication: ZU Hosted Pages:
Authors:
Mohamed Ahmed Hanafy Mahmoud Elshaer
Journal: Southern African Solar Energy Conference SASEC Volume:
Keywords : Plasma discharge , antireflection coating , , cells    
Abstract:
Homogeneous plasma dielectric barrier discharge is used to deposit antireflection thin films of hydrogenated silicon nitride on solar cells. The coating is made by a plasma discharge containing mainly SiH4 and NH3 diluted in argon at atmo
    
     
 
       

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