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Computerized Langmuir Probe Measurements in a Capacitively Coupled RF Discharge
Faculty
Engineering
Year:
2007
Type of Publication:
ZU Hosted
Pages:
Authors:
Amgad Elsayed Soulaiman
Staff Zu Site
Abstract In Staff Site
Journal:
28th ICPIG, July 15-20, 2007, Prague, Czech Republic 28th ICPIG, July 15-20, 2007, Prague, Czech Republic
Volume:
Keywords :
Computerized Langmuir Probe Measurements , , Capacitively Coupled
Abstract:
A system of automated computerized Langmuir probe measurements is used in order to determine the plasma parameters in a plasma reactor constructed for cleaning of metallic artifacts by RF discharge. A compensated probe insures the suppre
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