Modeling Of Radio Frequency Plasma Discharge

1\ particle - In - Cell with Monte Carlo collision ( PlC .. MCC) simulated is used to model the plasma generatedin a parallel plate radio - frequency ( RP ) capacitivelydischarge in Argon and hydrogen at low pressure . Theboundary condition include the si rfacc charcc on themo ’on obt in by finite iffercncc methods leading tothe self- consistent creation of sheaths on the boundaries.The collision between charged particles and neutralbackground gas atoms is included in the simulation,other interactions are neglected at low pressure .Numerical model , for plasma simulation is presented.The plasma distributions of Electric’ field and Electricpotential profiles with the axial distance for bothelectrons and ions obtained from this simulation were ingood agreement with those obtained by other simulationsusing continuum models. The mathematical model j sl s d for s ving th magnetohydyru 111ic and plasmakit .ric ·~qL ,) 1’01 S with Ol11e 11\/1)··