Experimental investigation of plasma RD discharge

Faculty Engineering Year: 2013
Type of Publication: Theses Pages: 110
Authors:
BibID 11780388
Keywords : Plasma (Lonized gasses)    
Abstract:
Dielectric barrier discharge (DBD) was attracted a lot of attention forpast twenty years because they were considered a source of non thermalplasma with a wide variety of application in the field of sterilization in biomedical application and chemical process in microelectronic industry. Itsapplication extends to, flat panel display fabrication, ozone production,plasma spray, and many other rapidly growing areas. This large-scale ofindustrial applications for DBD because of its scalability, effectiveness andlow cost . The aim of this thesis is studying DBD characteristic andunderstanding physical plasma parameters by measuring the voltage across the DBD cell, total current and charge accumulated on dielectric plate. DBD characteristics are affected by many factors such as external operatingparameter, reactor configuration and gas properties. Gas spacing is ouradjustable factor used in this thesis, which is varied between two plates from1 ~ 3 cm used to compared between characteristics. When the gas distanceincreases, the number of current pulses increase, the current densityincreases, the breakdown voltage increases, the accumulated chargedecreases and the discharge area ofDBD decrease.The discharge reactor occurs in a cross shaped Pyrex tube which consists of a parallel plates electrodes. One of which, the powered electrode,which is covered with Pyrex glass and the other is grounded. Handmadesupply source develops high voltage up to 6 kV peak with frequency 5.7kHz, which was established by an ignition transformer coil equipped with a driver circuit. Helium gas is injected through a hollowed electrode atatmospheric pressure.AbstractDielectric barrier discharge (DB D) was attracted a lot of attention forpast twenty years because they were considered a source of non thermalplasma with a wide variety of application in the field of sterilization inbiomedical application and chemical process in microelectronic industry. Itsapplication extends to, flat panel display fabrication, ozone production,plasma spray, and many other rapidly growing areas. This large-scale ofindustrial applications for DBD because of its scalability, effectiveness andlow costThe aim of this thesis is studying DBD characteristic andunderstanding physical plasma parameters by measuring the voltage acrossthe DBD cell, total current and charge accumulated on dielectric plate. DBDcharacteristics are affected by many factors such as external operatingparameter, reactor configuration and gas properties. Gas spacing is ouradjustable factor used in this thesis, which is varied between two plates from1-3 cm used to compared between characteristics. When the gas distancemcreases, the number of current pulses increase, the current densitymcreases, the breakdown voltage increases, the accumulated chargedecreases and the discharge area of DBD decrease.The discharge reactor occurs in a cross shaped Pyrex tube whichconsists of a parallel plates electrodes. One of which, the powered electrode,which is covered with Pyrex glass and the other is grounded. Handmadesupply source develops high voltage up to 6 kV peak with frequency 5.7kHz, which was established by an ignition transformer coil equipped with adriver circuit. Helium gas is injected through a hollowed electrode atatmospheric pressure.ii Dielectric barrier discharge (DBD) was attracted a lot of attention forpast twenty years because they were considered a source of non thermalplasma with a wide variety of application in the field of sterilization inbiomedical application and chemical process in microelectronic industry. Itsapplication extends to, flat panel display fabrication, ozone production,plasma spray, and many other rapidly growing areas. This large-scale ofindustrial applications for DBD because of its scalability, effectiveness andlow costThe aim of this thesis is studying DBD characteristic andunderstanding physical plasma parameters by measuring the voltage acrossthe DBD cell, total current and charge accumulated on dielectric plate. DBDcharacteristics are affected by many factors such as external operatingparameter, reactor configuration and gas properties. Gas spacing is ouradjustable factor used in this thesis, which is varied between two plates from1 ~ 3 cm used to compared between characteristics. When the gas distanceincreases, the number of current pulses increase, the current densityincreases, the breakdown voltage increases, the accumulated chargedecreases and the discharge area ofDBD decrease.The discharge reactor occurs in a cross shaped Pyrex tube whichconsists of a parallel plates electrodes. One of which, the powered electrode,which is covered with Pyrex glass and the other is grounded. Handmadesupply source develops high voltage up to 6 kV peak with frequency 5.7kHz, which was established by an ignition transformer coil equipped with adriver circuit. Helium gas is injected through a hollowed electrode atatmospheric pressure.iiAbstractDielectric barrier discharge (DB D) was attracted a lot of attention forpast twenty years because they were considered a source of non thermalplasma with a wide variety of application in the field of sterilization inbiomedical application and chemical process in microelectronic industry. Itsapplication extends to, flat panel display fabrication, ozone production,plasma spray, and many other rapidly growing areas. This large-scale ofindustrial applications for DBD because of its scalability, effectiveness andlow costThe aim of this thesis is studying DBD characteristic andunderstanding physical plasma parameters by measuring the voltage acrossthe DBD cell, total current and charge accumulated on dielectric plate. DBDcharacteristics are affected by many factors such as external operatingparameter, reactor configuration and gas properties. Gas spacing is ouradjustable factor used in this thesis, which is varied between two plates from1-3 cm used to compared between characteristics. When the gas distancemcreases, the number of current pulses increase, the current densitymcreases, the breakdown voltage increases, the accumulated chargedecreases and the discharge area of DBD decrease.The discharge reactor occurs in a cross shaped Pyrex tube whichconsists of a parallel plates electrodes. One of which, the powered electrode,which is covered with Pyrex glass and the other is grounded. Handmadesupply source develops high voltage up to 6 kV peak with frequency 5.7kHz, which was established by an ignition transformer coil equipped with adriver circuit. Helium gas is injected through a hollowed electrode atatmospheric pressure.ii Dielectric barrier discharge (DBD) was attracted a lot of attention forpast twenty years because they were considered a source of non thermalplasma with a wide variety of application in the field of sterilization inbiomedical application and chemical process in microelectronic industry. Itsapplication extends to, flat panel display fabrication, ozone production,plasma spray, and many other rapidly growing areas. This large-scale ofindustrial applications for DBD because of its scalability, effectiveness andlow costThe aim of this thesis is studying DBD characteristic andunderstanding physical plasma parameters by measuring the voltage acrossthe DBD cell, total current and charge accumulated on dielectric plate. DBDcharacteristics are affected by many factors such as external operatingparameter, reactor configuration and gas properties. Gas spacing is ouradjustable factor used in this thesis, which is varied between two plates from1 ~ 3 cm used to compared between characteristics. When the gas distanceincreases, the number of current pulses increase, the current densityincreases, the breakdown voltage increases, the accumulated chargedecreases and the discharge area ofDBD decrease.The discharge reactor occurs in a cross shaped Pyrex tube whichconsists of a parallel plates electrodes. One of which, the powered electrode,which is covered with Pyrex glass and the other is grounded. Handmadesupply source develops high voltage up to 6 kV peak with frequency 5.7kHz, which was established by an ignition transformer coil equipped with adriver circuit. Helium gas is injected through a hollowed electrode atatmospheric pressure.iiAbstractDielectric barrier discharge (DB D) was attracted a lot of attention forpast twenty years because they were considered a source of non thermalplasma with a wide variety of application in the field of sterilization inbiomedical application and chemical process in microelectronic industry. Itsapplication extends to, flat panel display fabrication, ozone production,plasma spray, and many other rapidly growing areas. This large-scale ofindustrial applications for DBD because of its scalability, effectiveness andlow costThe aim of this thesis is studying DBD characteristic andunderstanding physical plasma parameters by measuring the voltage acrossthe DBD cell, total current and charge accumulated on dielectric plate. DBDcharacteristics are affected by many factors such as external operatingparameter, reactor configuration and gas properties. Gas spacing is ouradjustable factor used in this thesis, which is varied between two plates from1-3 cm used to compared between characteristics. When the gas distancemcreases, the number of current pulses increase, the current densitymcreases, the breakdown voltage increases, the accumulated chargedecreases and the discharge area of DBD decrease.The discharge reactor occurs in a cross shaped Pyrex tube whichconsists of a parallel plates electrodes. One of which, the powered electrode,which is covered with Pyrex glass and the other is grounded. Handmadesupply source develops high voltage up to 6 kV peak with frequency 5.7kHz, which was established by an ignition transformer coil equipped with adriver circuit. Helium gas is injected through a hollowed electrode atatmospheric pressure.ii Dielectric barrier discharge (DBD) was attracted a lot of attention forpast twenty years because they were considered a source of non thermalplasma with a wide variety of application in the field of sterilization inbiomedical application and chemical process in microelectronic industry. Itsapplication extends to, flat panel display fabrication, ozone production,plasma spray, and many other rapidly growing areas. This large-scale ofindustrial applications for DBD because of its scalability, effectiveness andlow costThe aim of this thesis is studying DBD characteristic andunderstanding physical plasma parameters by measuring the voltage acrossthe DBD cell, total current and charge accumulated on dielectric plate. DBDcharacteristics are affected by many factors such as external operatingparameter, reactor configuration and gas properties. Gas spacing is ouradjustable factor used in this thesis, which is varied between two plates from1 ~ 3 cm used to compared between characteristics. When the gas distanceincreases, the number of current pulses increase, the current densityincreases, the breakdown voltage increases, the accumulated chargedecreases and the discharge area ofDBD decrease.The discharge reactor occurs in a cross shaped Pyrex tube whichconsists of a parallel plates electrodes. One of which, the powered electrode,which is covered with Pyrex glass and the other is grounded. Handmadesupply source develops high voltage up to 6 kV peak with frequency 5.7kHz, which was established by an ignition transformer coil equipped with adriver circuit. Helium gas is injected through a hollowed electrode atatmospheric pressure.iiAbstractDielectric barrier discharge (DB D) was attracted a lot of attention forpast twenty years because they were considered a source of non thermalplasma with a wide variety of application in the field of sterilization inbiomedical application and chemical process in microelectronic industry. Itsapplication extends to, flat panel display fabrication, ozone production,plasma spray, and many other rapidly growing areas. This large-scale ofindustrial applications for DBD because of its scalability, effectiveness andlow costThe aim of this thesis is studying DBD characteristic andunderstanding physical plasma parameters by measuring the voltage acrossthe DBD cell, total current and charge accumulated on dielectric plate. DBDcharacteristics are affected by many factors such as external operatingparameter, reactor configuration and gas properties. Gas spacing is ouradjustable factor used in this thesis, which is varied between two plates from1-3 cm used to compared between characteristics. When the gas distancemcreases, the number of current pulses increase, the current densitymcreases, the breakdown voltage increases, the accumulated chargedecreases and the discharge area of DBD decrease.The discharge reactor occurs in a cross shaped Pyrex tube whichconsists of a parallel plates electrodes. One of which, the powered electrode,which is covered with Pyrex glass and the other is grounded. Handmadesupply source develops high voltage up to 6 kV peak with frequency 5.7kHz, which was established by an ignition transformer coil equipped with adriver circuit. Helium gas is injected through a hollowed electrode atatmospheric pressure. 
   
     
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