PLASMA DISCHARGE FOR ANTIREFLECTION COATING OF PV CELLS

Faculty Engineering Year: 2014
Type of Publication: ZU Hosted Pages:
Authors:
Journal: •2nd Southern African Solar Energy Conference - SASEC 2014 •2nd Southern African Solar Energy Conference - SASEC 2014 Volume:
Keywords : PLASMA DISCHARGE , ANTIREFLECTION COATING , , CELLS    
Abstract:
Homogeneous plasma dielectric barrier discharge is used to deposit antireflection thin films of hydrogenated silicon nitride on solar cells. The coating is made by a plasma discharge containing mainly SiH4 and NH3 diluted in argon at atmo
   
     
 
       

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